Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods.
This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales.
1. Cover image - p. Cover 2. Title page - p. iii 3. Table of Contents - p. iii 4. Copyright - p. iv 5. List of Contributors - p. ix 6. About the Editors - p. xi 7. Preface - p. xiii 8. Chapter 1. Nonaqueous Cleaning Challenges for Preventing Damage to Fragile Nanostructures - p. 1 9. Chapter 2. Gas-Phase Cleaning for Removal of Surface Contaminants - p. 27 10. Chapter 3. Laser-Induced Spray Jet Cleaning - p. 83 11. Chapter 4. Brush Scrubbing for Post-CMP Cleaning - p. 109 12. Chapter 5. Contamination Removal From UV and EUV Photomasks - p. 135 13. Chapter 6. Aqueous Displacement of Water-Immiscible Cleaning Solvents: Cleaning Enhancement Using Ultrasonics - p. 175 14. Index - p. 191
Developments in Surface Contamination and Cleaning: Methods for Surface Cleaning, Volume 9, part of the Developments in Surface Contamination and Cleaning series provide a state-of-the-art guide to the current knowledge on the behavior of film-type and particulate surface contaminants and their associated cleaning methods.
This newest volume in the series discusses methods of surface cleaning of contaminants and the resources that are needed to deal with them. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales.
1. Cover image - p. Cover 2. Title page - p. iii 3. Table of Contents - p. iii 4. Copyright - p. iv 5. List of Contributors - p. ix 6. About the Editors - p. xi 7. Preface - p. xiii 8. Chapter 1. Nonaqueous Cleaning Challenges for Preventing Damage to Fragile Nanostructures - p. 1 9. Chapter 2. Gas-Phase Cleaning for Removal of Surface Contaminants - p. 27 10. Chapter 3. Laser-Induced Spray Jet Cleaning - p. 83 11. Chapter 4. Brush Scrubbing for Post-CMP Cleaning - p. 109 12. Chapter 5. Contamination Removal From UV and EUV Photomasks - p. 135 13. Chapter 6. Aqueous Displacement of Water-Immiscible Cleaning Solvents: Cleaning Enhancement Using Ultrasonics - p. 175 14. Index - p. 191
