Modern Ion Plating Technology: Fundamentals and Applications discusses the fundamental concepts of plasma physics in various coating technologies and explores its development and implementation into new technologies. Recent progress of technologies and products via ion plating will be introduced. The book begins with the treatment of vacuum physics, through plasma physics. It then presents the various forms of ion plating, before concluding with a section presenting examples of applications where ion plating is employed. Through the material presented in this book, the reader gains an understanding of the importance of ion plating technology to human progress and its various potential applications. Under the guidance of plasma physics knowledge, how to use electric and electromagnetic fields to control the space plasma will be critical to the development of new technology and systems.
1. Chapter 1 Introduction to modern ion plating technology - p. 1 2. Chapter 2 Fundamentals of vacuum physics - p. 9 3. Chapter 3 Fundamentals of plasma physics - p. 29 4. Chapter 4 Vacuum evaporation coating technology - p. 91 5. Chapter 5 Glow discharge ion plating technology - p. 115 6. Chapter 6 Arc discharge ion plating technology by hot electron emission - p. 137 7. Chapter 7 Cathodic arc ion plating - p. 151 8. Chapter 8 Magnetron sputtering - p. 189 9. Chapter 9 Effect of charged particle flow on plating - p. 229 10. Chapter 10 Plasma-enhanced chemical vapor deposition - p. 247 11. Chapter 11 Plasma polymerization - p. 287 12. Chapter 12 Applications in solar thin films - p. 321 13. Chapter 13 Applications in information display films - p. 341 14. Chapter 14 Applications in decorative films - p. 365 15. Chapter 15 Applications in optical films - p. 381 16. Chapter 16 Applications of hard coatings - p. 411 17. Chapter 17 Applications in carbon-based film - p. 431 18. Chapter 18 Applications in thermoelectric thin films - p. 459 19. Chapter 19 New advances in low-temperature plasma chemical heat treatment - p. 475 20. Index - p. 497
Modern Ion Plating Technology: Fundamentals and Applications discusses the fundamental concepts of plasma physics in various coating technologies and explores its development and implementation into new technologies. Recent progress of technologies and products via ion plating will be introduced. The book begins with the treatment of vacuum physics, through plasma physics. It then presents the various forms of ion plating, before concluding with a section presenting examples of applications where ion plating is employed. Through the material presented in this book, the reader gains an understanding of the importance of ion plating technology to human progress and its various potential applications. Under the guidance of plasma physics knowledge, how to use electric and electromagnetic fields to control the space plasma will be critical to the development of new technology and systems.
1. Chapter 1 Introduction to modern ion plating technology - p. 1 2. Chapter 2 Fundamentals of vacuum physics - p. 9 3. Chapter 3 Fundamentals of plasma physics - p. 29 4. Chapter 4 Vacuum evaporation coating technology - p. 91 5. Chapter 5 Glow discharge ion plating technology - p. 115 6. Chapter 6 Arc discharge ion plating technology by hot electron emission - p. 137 7. Chapter 7 Cathodic arc ion plating - p. 151 8. Chapter 8 Magnetron sputtering - p. 189 9. Chapter 9 Effect of charged particle flow on plating - p. 229 10. Chapter 10 Plasma-enhanced chemical vapor deposition - p. 247 11. Chapter 11 Plasma polymerization - p. 287 12. Chapter 12 Applications in solar thin films - p. 321 13. Chapter 13 Applications in information display films - p. 341 14. Chapter 14 Applications in decorative films - p. 365 15. Chapter 15 Applications in optical films - p. 381 16. Chapter 16 Applications of hard coatings - p. 411 17. Chapter 17 Applications in carbon-based film - p. 431 18. Chapter 18 Applications in thermoelectric thin films - p. 459 19. Chapter 19 New advances in low-temperature plasma chemical heat treatment - p. 475 20. Index - p. 497
