Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include: Introduction to vaccum and end uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail. This volume also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as trade-offs in system design, allowing for the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.
1. Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1 - p. Page i 2. Cover - p. Page i 3. Front Matter - p. Page ii 4. Table of Contents - p. Page iii 5. Vacuum and Thin-Film Deposition Technologies - p. Page iv 6. Copyright - p. Page v 7. About the authors - p. Page vi 8. Acknowledgments - p. Page vii 9. List of Illustrations - p. Page viii 10. List of Tables - p. Page ix 11. Chapter One : 2500years of vacuum science and technology - p. Page ix 12. Chapter Two : Understanding pressure and vacuum - p. Page 38 13. Chapter Three : Overview of vacuum systems - p. Page 84 14. Chapter Four : Examples of vacuum systems - p. Page 125 15. Chapter Five : The movement of gases in vacuum systems - p. Page 178 16. Chapter Six : Understanding unwanted gases in vacuum systems - p. Page 229 17. Symbols used in vacuum system design - p. Page 295 18. Fundamentals of Vacuum Science Glossary - p. Page 308 19. Index - p. Page 324
Fundamentals of Vacuum Science and System Design for High and Ultra-High Vacuum, Volume 1: Introduction to Vacuum and Systems details the important practical considerations in design of vacuum systems for various vacuum deposition technologies. Topics covered include: Introduction to vaccum and end uses, molecular density in vacuum, molecular flow in various vacuum regimes, characteristics of gas composition at various molecular densities, general principles of gas-solid interactions, vacuum pump technology, pressure sensors, leak detection and the impact of fundamental design decisions and operating practices on vacuum system performance. The introductory sections are designed to introduce the reader to basic concepts in vacuum technology. More detailed sections provide fundamental descriptions of basic vacuum pumps and pumping mechanisms in current practice and provides insight into the various pros and cons for each approach. System design, assembly, maintenance, and trouble-shooting are reviewed in detail. This volume also describes a wide range of pressure measurement approaches, and includes several key characterization techniques, example applications on systems for rough vacuum, high vacuum and ultra-high vacuum, as well as trade-offs in system design, allowing for the reader to develop an understanding of all the elements required for a successfully designed, assembled, and operating system.
1. Fundamentals of Vacuum Science and System Design for High and Ultrahigh Vacuum, Volume 1 - p. Page i 2. Cover - p. Page i 3. Front Matter - p. Page ii 4. Table of Contents - p. Page iii 5. Vacuum and Thin-Film Deposition Technologies - p. Page iv 6. Copyright - p. Page v 7. About the authors - p. Page vi 8. Acknowledgments - p. Page vii 9. List of Illustrations - p. Page viii 10. List of Tables - p. Page ix 11. Chapter One : 2500years of vacuum science and technology - p. Page ix 12. Chapter Two : Understanding pressure and vacuum - p. Page 38 13. Chapter Three : Overview of vacuum systems - p. Page 84 14. Chapter Four : Examples of vacuum systems - p. Page 125 15. Chapter Five : The movement of gases in vacuum systems - p. Page 178 16. Chapter Six : Understanding unwanted gases in vacuum systems - p. Page 229 17. Symbols used in vacuum system design - p. Page 295 18. Fundamentals of Vacuum Science Glossary - p. Page 308 19. Index - p. Page 324
