Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry.
When pursuing patents, there is a phase called ‘reduction to practice’ where the idea for a technology transitions from a concept to actual use. The section ‘Thin Film Reduction to Practice’ includes chapters that review the most relevant methods to fabricate thin films towards practical applications. Then, the latest applications of thin film deposition technologies are discussed.
Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists and engineers in academia and working in semiconductor R&D.
1. Handbook of Thin Film Deposition - p. i 2. Cover - p. i 3. Title Page - p. iii 4. Copyright Page - p. iv 5. Dedication - p. v 6. Table of Contents - p. v 7. Contributors - p. xiii 8. Foreword - p. xv 9. Preface - p. xvii 10. Acknowledgments - p. xix 11. Chapter 1 The role of thin films in nanotechnology - p. 3 12. Chapter 2 Process integration for on-chip interconnects - p. 17 13. Chapter 3 Sputter processing - p. 94 14. Chapter 4 Epitaxial growth processes for high performance advanced CMOS devices - p. 141 15. Chapter 5 Equipment and manufacturability issues in chemical vapor deposition processes - p. 194 16. Chapter 6 CMP: Scaling down and stacking up: How the trends in semiconductors are affecting chemical-mechanical planarization - p. 258 17. Chapter 7 Limits of gate dielectrics scaling - p. 290 18. Chapter 8 Semiconductor reliability overview - p. 359 19. Chapter 9 Thin film development for LED technologies - p. 370 20. Chapter 10 Emerging ferroelectric thin films: Applications and processing - p. 405 21. Chapter 11 Thin films in semiconductor memory - p. 456 22. Chapter 12 Yield impact of defects from thin films and other processing steps - p. 486 23. Summary - p. 507 24. Index - p. 509
Handbook of Thin Film Deposition, Fifth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry.
When pursuing patents, there is a phase called ‘reduction to practice’ where the idea for a technology transitions from a concept to actual use. The section ‘Thin Film Reduction to Practice’ includes chapters that review the most relevant methods to fabricate thin films towards practical applications. Then, the latest applications of thin film deposition technologies are discussed.
Handbook of Thin Film Deposition, 5th Edition is suitable for materials scientists and engineers in academia and working in semiconductor R&D.
1. Handbook of Thin Film Deposition - p. i 2. Cover - p. i 3. Title Page - p. iii 4. Copyright Page - p. iv 5. Dedication - p. v 6. Table of Contents - p. v 7. Contributors - p. xiii 8. Foreword - p. xv 9. Preface - p. xvii 10. Acknowledgments - p. xix 11. Chapter 1 The role of thin films in nanotechnology - p. 3 12. Chapter 2 Process integration for on-chip interconnects - p. 17 13. Chapter 3 Sputter processing - p. 94 14. Chapter 4 Epitaxial growth processes for high performance advanced CMOS devices - p. 141 15. Chapter 5 Equipment and manufacturability issues in chemical vapor deposition processes - p. 194 16. Chapter 6 CMP: Scaling down and stacking up: How the trends in semiconductors are affecting chemical-mechanical planarization - p. 258 17. Chapter 7 Limits of gate dielectrics scaling - p. 290 18. Chapter 8 Semiconductor reliability overview - p. 359 19. Chapter 9 Thin film development for LED technologies - p. 370 20. Chapter 10 Emerging ferroelectric thin films: Applications and processing - p. 405 21. Chapter 11 Thin films in semiconductor memory - p. 456 22. Chapter 12 Yield impact of defects from thin films and other processing steps - p. 486 23. Summary - p. 507 24. Index - p. 509
