Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS).
The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information.
1. Cover image - p. i 2. Title page - p. i 3. Table of Contents - p. iii 4. Related titles - p. ii 5. Copyright - p. iv 6. List of Contributors - p. xi 7. 1. What makes sensor devices and microsystems “intelligent” or “smart”? - p. 1 8. 2. Interfacing sensors to microcontrollers: a direct approach - p. 23 9. 3. Smart temperature sensors and temperature sensor systems - p. 57 10. 4. Capacitive sensors for displacement measurement in the subnanometer range - p. 87 11. 5. Integrated inductive displacement sensors for harsh industrial environments - p. 101 12. 6. Magnetic sensors and industrial sensing applications - p. 131 13. 7. Advanced silicon radiation detectors in the vacuum ultraviolet and the extreme ultraviolet spectral range - p. 151 14. 8. Advanced interfaces for resistive sensors - p. 171 15. 9. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications - p. 221 16. 10. Advanced Optical Incremental Sensors: Encoders and Interferometers - p. 245 17. 11. Microfabrication technologies used for creating smart devices for industrial applications - p. 291 18. 12. Microactuators: Design and Technology - p. 313 19. 13. Microreaction chambers - p. 355 20. 14. Dynamic behavior of smart microelectromechanical systems in industrial applications - p. 377 21. 15. Microelectromechanical systems integrating motion and displacement sensors - p. 395 22. 16. Microelectromechanical systems print heads for industrial printing - p. 429 23. 17. Photovoltaic and fuel cells in power microelectromechanical systems for smart energy management - p. 461 24. 18. RF-MEMS for smart communication systems and future 5G applications - p. 499 25. 19. Smart acoustic sensor array system for real-time sound processing applications - p. 541 26. Index - p. 567
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS).
The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information.
1. Cover image - p. i 2. Title page - p. i 3. Table of Contents - p. iii 4. Related titles - p. ii 5. Copyright - p. iv 6. List of Contributors - p. xi 7. 1. What makes sensor devices and microsystems “intelligent” or “smart”? - p. 1 8. 2. Interfacing sensors to microcontrollers: a direct approach - p. 23 9. 3. Smart temperature sensors and temperature sensor systems - p. 57 10. 4. Capacitive sensors for displacement measurement in the subnanometer range - p. 87 11. 5. Integrated inductive displacement sensors for harsh industrial environments - p. 101 12. 6. Magnetic sensors and industrial sensing applications - p. 131 13. 7. Advanced silicon radiation detectors in the vacuum ultraviolet and the extreme ultraviolet spectral range - p. 151 14. 8. Advanced interfaces for resistive sensors - p. 171 15. 9. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications - p. 221 16. 10. Advanced Optical Incremental Sensors: Encoders and Interferometers - p. 245 17. 11. Microfabrication technologies used for creating smart devices for industrial applications - p. 291 18. 12. Microactuators: Design and Technology - p. 313 19. 13. Microreaction chambers - p. 355 20. 14. Dynamic behavior of smart microelectromechanical systems in industrial applications - p. 377 21. 15. Microelectromechanical systems integrating motion and displacement sensors - p. 395 22. 16. Microelectromechanical systems print heads for industrial printing - p. 429 23. 17. Photovoltaic and fuel cells in power microelectromechanical systems for smart energy management - p. 461 24. 18. RF-MEMS for smart communication systems and future 5G applications - p. 499 25. 19. Smart acoustic sensor array system for real-time sound processing applications - p. 541 26. Index - p. 567
